Combining Scanning Probe Microscopy and Transmission Electron Microscopy
Book chapter, 2011

This chapter is a review of an in situ method where a scanning electron microscope (SPM) has been combined with a transmission electron microscope (TEM). By inserting a miniaturized SPM inside a TEM, a large set of open problems can be addressed and, perhaps more importantly, one may start to think about experiments in a new kind of laboratory, an in situ TEM probing laboratory, where the TEM is transformed from a microscope for still images to a real-time local probing tool. In this method, called TEMSPM, the TEM is used for imaging and analysis of a sample and SPM tip, while the SPM is used for probing of electrical and mechanical properties or for local manipulation of the sample. This chapter covers both instrumental and application aspects of TEMSPM.





Alexandra Nafari

Chalmers, Applied Physics, Electronics Material and Systems

Johan Angenete

Krister Svensson

Anke Sanz-Velasco

Chalmers, Applied Physics, Electronics Material and Systems

Scanning Probe Microscopy in Nanoscience and Nanotechnology

978-3-642-10496-1 (ISBN)

Areas of Advance

Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)

Materials Science

Subject Categories

Materials Engineering

Nano Technology

Other Electrical Engineering, Electronic Engineering, Information Engineering



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