Controlling In-Ga-Zn-O thin films transport properties through density changes
Journal article, 2016
In-Ga-Zn-O
Schottky contacts
Amorphous oxide semiconductors
IGZO
Atom Probe Tomography
Author
J. Kaczmarski
Instytut Technologii Elektronowej (ITE)
Torben Boll
Chalmers, Physics, Materials Microstructure
M. A. Borysiewicz
Instytut Technologii Elektronowej (ITE)
A. Taube
Warsaw University of Technology
Instytut Technologii Elektronowej (ITE)
Mattias Thuvander
Chalmers, Physics, Materials Microstructure
Jiayan Law
Chalmers, Physics, Materials Microstructure
E. Kaminska
Instytut Technologii Elektronowej (ITE)
Krystyna Marta Stiller
Chalmers, Physics, Materials Microstructure
Thin Solid Films
0040-6090 (ISSN)
Vol. 608 57-61Subject Categories
Materials Engineering
Physical Sciences
Areas of Advance
Materials Science
DOI
10.1016/j.tsf.2016.04.012