Effect of high temperature oxidation of 4H-SiC on the near-interface traps measured by TDRC
Paper in proceeding, 2009
TDRC
MOS
High temperature oxidation
Interface trap density
Author
Fredrik Allerstam
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Einar Sveinbjörnsson
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Materials Science Forum
0255-5476 (ISSN) 16629752 (eISSN)
Vol. 615 617 537-540978-087849334-0 (ISBN)
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.4028/www.scientific.net/MSF.615-617.537
ISBN
978-087849334-0