Toward CMOS compatible wafer-scale fabrication of carbon-based microsupercapacitors for IoT
Paper in proceedings, 2018
Author
Anderson David Smith
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Qi Li
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
A. Anderson
University of California
Agin Vyas
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Volodymyr Kuzmenko
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Mohammad Mazharul Haque
Chalmers, Microtechnology and Nanoscience (MC2)
Henrik Staaf
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Per Lundgren
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory
Journal of Physics: Conference Series
17426588 (ISSN) 17426596 (eISSN)
Vol. 1052 1 012143Kanazawa, Japan,
Subject Categories
Chemical Process Engineering
Other Physics Topics
Energy Systems
DOI
10.1088/1742-6596/1052/1/012143