Toward CMOS compatible wafer-scale fabrication of carbon-based microsupercapacitors for IoT
Paper in proceedings, 2018

This work presents a wafer-scale method of microsupercapacitor (MSC) fabrication. Deposition of the electrode precursor, i.e. graphene oxide, is accomplished through spin-coating which allows for potential application in CMOS compatible processes for future integrated on-chip energy storage systems. Our MSCs have an areal capacitance of 0.4 mF/cm2at 10 μA, which is a very promising result. Further, the MSC has good rate capability as its capacitance decreases by only 0.03 mF/cm2when the current increases to 50 μA. The MSCs have a maximum energy density of 0.04 μWh/cm2and a maximum power density as high as 96 μW/cm2. Additionally, the wafer-scale process demonstrates industrial viability.

Author

Anderson David Smith

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Qi Li

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

A. Anderson

University of California

Agin Vyas

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Volodymyr Kuzmenko

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Mohammad Mazharul Haque

Chalmers, Microtechnology and Nanoscience (MC2)

Henrik Staaf

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Per Lundgren

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Journal of Physics: Conference Series

17426588 (ISSN) 17426596 (eISSN)

Vol. 1052 1 012143

17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017
Kanazawa, Japan,

Subject Categories

Chemical Process Engineering

Other Physics Topics

Energy Systems

DOI

10.1088/1742-6596/1052/1/012143

More information

Latest update

7/8/2019 3