Toward CMOS compatible wafer-scale fabrication of carbon-based microsupercapacitors for IoT
Paper i proceeding, 2018

This work presents a wafer-scale method of microsupercapacitor (MSC) fabrication. Deposition of the electrode precursor, i.e. graphene oxide, is accomplished through spin-coating which allows for potential application in CMOS compatible processes for future integrated on-chip energy storage systems. Our MSCs have an areal capacitance of 0.4 mF/cm2at 10 μA, which is a very promising result. Further, the MSC has good rate capability as its capacitance decreases by only 0.03 mF/cm2when the current increases to 50 μA. The MSCs have a maximum energy density of 0.04 μWh/cm2and a maximum power density as high as 96 μW/cm2. Additionally, the wafer-scale process demonstrates industrial viability.

Författare

Anderson David Smith

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Qi Li

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

A. Anderson

University of California

Agin Vyas

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Volodymyr Kuzmenko

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Mohammad Mazharul Haque

Chalmers, Mikroteknologi och nanovetenskap (MC2)

Henrik Staaf

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Per Lundgren

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Journal of Physics: Conference Series

17426588 (ISSN) 17426596 (eISSN)

Vol. 1052 1 012143

17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017
Kanazawa, Japan,

Ämneskategorier

Kemiska processer

Annan fysik

Energisystem

DOI

10.1088/1742-6596/1052/1/012143

Mer information

Senast uppdaterat

2019-07-08