Precise setting of micro-cavity resonance wavelength by dry etching
Journal article, 2019

With an intracavity phase tuning technique, the authors demonstrate <2 nm precision in wavelength setting of vertical-cavity surface-emitting laser (VCSEL) microresonators in the wavelength range 1040-1070 nm using an Ar ion-beam etching process with subnanometer precision in etch depth. This postgrowth fabrication technique for controlling the wavelength of individual VCSELs is promising for the development of monolithic multiwavelength VCSEL arrays with precisely defined wavelengths for wavelength division multiplexed (WDM) optical interconnects and the assembly of compact and high-capacity WDM transmitters.


Mehdi Jahed

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Johan Gustavsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Anders Larsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

21662746 (ISSN) 21662754 (eISSN)

Vol. 37 3 031217

Multi-Tbps Optical Interconnects (MuTOI)

Swedish Foundation for Strategic Research (SSF) (SE13-0014), 2014-03-01 -- 2019-06-30.

Integrerade optiska sändare för våglängdsmultiplexering i datacenternätverk

Swedish Research Council (VR) (2016-06077), 2017-01-01 -- 2022-12-31.

Subject Categories

Accelerator Physics and Instrumentation

Atom and Molecular Physics and Optics

Materials Chemistry



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