Native oxide on ultra-thin NbN films
Paper in proceedings, 2019

We report study of native oxide formation over NbN ultra-thin films. With a help of XPS, chemical and phase depth profiles of NbN film of 5 nm and 10 nm thickness exposed to room air for more than a month were recorded. The surface of those films were sputtered with Ar+ ions and consequently oxidized in room air for another few days. It was found that an intermediate layer of NbNx was formed between the niobium oxide layer and original NbN material.

Author

A. Lubenschenko

National Research University Moscow Power Engineering Institute

Alexey Pavolotskiy

Chalmers, Space, Earth and Environment, Onsala Space Observatory, GARD Technology

Sascha Krause

Chalmers, Space, Earth and Environment, Onsala Space Observatory, GARD Technology

Olga Lubenchenko

National Research University Moscow Power Engineering Institute

D. A. Ivanov

National Research University Moscow Power Engineering Institute

Vincent Desmaris

Chalmers, Space, Earth and Environment, Onsala Space Observatory, GARD Technology

Victor Belitsky

Chalmers, Space, Earth and Environment, Onsala Space Observatory, GARD Technology

ISSTT 2019 - 30th International Symposium on Space Terahertz Technology, Proceedings Book

95-98

2019 30th International Symposium on Space Terahertz Technology, ISSTT 2019
Gothenburg, Sweden,

Subject Categories

Inorganic Chemistry

Materials Chemistry

Corrosion Engineering

More information

Latest update

12/8/2020