Low-loss dispersion-engineered silicon nitride waveguides coated with a thin blanket layer
Paper in proceeding, 2022
We demonstrate that coating with a thin blanket layer reduces the propagation loss of silicon nitride dispersion-engineered waveguides featuring strong optical field confinement.
Author
Yi Sun
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Zhichao Ye
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Raphaël Van Laer
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Technology
Anders Larsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Victor Torres Company
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Optics InfoBase Conference Papers
21622701 (eISSN)
JW3B.1839781557528209 (ISBN)
2022 Conference on Lasers and Electro-Optics, CLEO 2022
San Jose, USA,
San Jose, USA,
Subject Categories
Manufacturing, Surface and Joining Technology
Other Materials Engineering
Medical Materials