Thin-film UV VCSELs and LEDs by electrochemical etching
Paper in proceeding, 2022

We will give an overview of state-of-the-art results and challenges to achieve high-performing III-nitride vertical-cavity surface-emitting lasers (VCSELs), with a particular focus on the requirements to push the emission wavelength into the ultraviolet (UV). Our method to simultaneously achieve high-reflectivity mirrors and good cavity length control by electrochemical etching enabled the world’s first UV-B VCSEL. The use of dielectric mirrors yielded lasers with a very temperature-stable emission wavelength thanks to the negative thermo-optic coefficient of the mirrors. We have used the same etch methodology to also lift-off fully processed LEDs from their growth substrate to improve the light extraction efficiency.

led

vcsel

electrochemical etching

Author

Åsa Haglund

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Other publications Research

Filip Hjort

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Other publications Research

Johannes Enslin

Technische Universität Berlin

Michael Alexander Bergmann

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Other publications Research

Munise Cobet

Technische Universität Berlin

Giulia Cardinali

Technische Universität Berlin

Nando Prokop

Technische Universität Berlin

Lars Persson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Other publications Research

Martin Guttmann

Technische Universität Berlin

Luca Sulmoni

Technische Universität Berlin

Neysha Lobo-Ploch

Ferdinand-Braun-Institut fur Hochstfrequenztechnik

Tim Kolbe

Ferdinand-Braun-Institut fur Hochstfrequenztechnik

Johan Gustavsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Other publications Research

Joachim Ciers

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Other publications Research

Tim Wernicke

Technische Universität Berlin

Michael Kneissl

Technische Universität Berlin

Proceedings of SPIE - The International Society for Optical Engineering

0277786X (ISSN) 1996756X (eISSN)

Vol. PC12022

Light-Emitting Devices, Materials, and Applications XXVI at SPIE Photonics West,
San Francisco, USA,

Areas of Advance

Nanoscience and Nanotechnology

Materials Science

Subject Categories

Physical Sciences

Other Materials Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

Nano Technology

Infrastructure

Chalmers Materials Analysis Laboratory

Nanofabrication Laboratory

More information

Latest update

1/20/2023

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