AlGaN/GaN/AlN 'Buffer-Free' High Voltage MISHEMTs with Si-rich and Stoichiometric SiNx First Passivation
Paper in proceeding, 2022
SiN passivation x
'buffer-free'
GaN-on-SiC
MISHEMT
AlGaN/GaN/AlN
high voltage
Author
Björn Hult
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Mattias Thorsell
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
J. T. Chen
SweGaN AB
Niklas Rorsman
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
2022 Compound Semiconductor Week, CSW 2022
9781665453400 (ISBN)
Ann Arbor, USA,
Subject Categories
Materials Chemistry
Other Electrical Engineering, Electronic Engineering, Information Engineering
Condensed Matter Physics
DOI
10.1109/CSW55288.2022.9930464