Qubit-compatible substrates with superconducting through-silicon vias
Journal article, 2022
We fabricate and characterize superconducting through-silicon vias and electrodes suitable for superconducting quantum processors. We measure internal quality factors of a million for test resonators excited at single-photon levels, on chips with superconducting vias used to stitch ground planes on the front and back sides of the chips. This resonator performance is on par with the state of the art for silicon-based planar solutions, despite the presence of vias. Via stitching of ground planes is an important enabling technology for increasing the physical size of quantum processor chips and is a first step toward more complex quantum devices with 3-D integration.
Semiconductor device measurement
Electrodes
Qubit
Through-silicon vias
Superconducting microwave devices
Q-factor
Resonators
Author
Kestutis Grigoras
Technical Research Centre of Finland (VTT)
Nikolai Yurttagul
Technical Research Centre of Finland (VTT)
Jukka-Pekka Kaikkonen
Technical Research Centre of Finland (VTT)
Elsa Mannila
Technical Research Centre of Finland (VTT)
P. Eskelinen
Technical Research Centre of Finland (VTT)
Daniel Perez Lozano
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Technology
Hangxi Li
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Technology
Marcus Rommel
Chalmers, Microtechnology and Nanoscience (MC2), Nanofabrication Laboratory
Daryoush Shiri
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Technology
Nils Tiencken
Technical Research Centre of Finland (VTT)
Slawomir Simbierowicz
Technical Research Centre of Finland (VTT)
A. Ronzani
Technical Research Centre of Finland (VTT)
J. Hatinen
Technical Research Centre of Finland (VTT)
D. Datta
Technical Research Centre of Finland (VTT)
Visa Vesterinen
Technical Research Centre of Finland (VTT)
Leif Gronberg
Technical Research Centre of Finland (VTT)
Janka Biznárová
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Technology
Anita Fadavi Roudsari
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Technology
Sandoko Kosen
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Technology
Amr Osman
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Technology
M. Prunnila
Technical Research Centre of Finland (VTT)
Juha Hassel
Technical Research Centre of Finland (VTT)
Jonas Bylander
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Technology
Joonas Govenius
Technical Research Centre of Finland (VTT)
IEEE Transactions on Quantum Engineering
26891808 (eISSN)
Vol. 3 5100310Wallenberg Centre for Quantum Technology (WACQT)
Knut and Alice Wallenberg Foundation (KAW 2017.0449, KAW2021.0009, KAW2022.0006), 2018-01-01 -- 2030-03-31.
An Open Superconducting Quantum Computer (OpenSuperQ)
European Commission (EC) (EC/H2020/820363), 2018-10-01 -- 2021-09-30.
Areas of Advance
Nanoscience and Nanotechnology
Materials Science
Subject Categories (SSIF 2011)
Nano Technology
Other Electrical Engineering, Electronic Engineering, Information Engineering
Condensed Matter Physics
DOI
10.1109/TQE.2022.3209881