Scattering Mechanisms in Silicon Carbide MOSFETs with Gate Oxides Fabricated using Sodium Enhanced Oxidation Technique
Paper in proceeding, 2009
Author
V. Tilak
GE Global Research
K. Matocha
GE Global Research
G. Dunne
GE Global Research
Fredrik Allerstam
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Einar Sveinbjörnsson
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Materials Science Forum
0255-5476 (ISSN) 16629752 (eISSN)
Vol. 600-603 687-6909780878493579 (ISBN)
Subject Categories
Materials Engineering
Condensed Matter Physics
DOI
10.4028/www.scientific.net/msf.600-603.687
ISBN
9780878493579