Refractive Lenses in Silicon Micromachining by Reflow of Amorphous Fluorocarbon Polymer
Paper in proceeding, 2005
Author
Karin Hedsten
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
David Karlén
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Presented at Micromechanics Europe (MME05) (Göteborg, Sweden, Sept. 4-6, 2005)
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering