Integrated Tunable VCSELs With Simple MEMS Technology
Paper in proceeding, 2010
A simple MEMS technology for wafer-scale fabrication of tunable VCSELs is presented. Reflown photo-resist droplets serve as preform for making curved movable micro-mirrors. First devices show a tuning range of 15 nm with mW-output power.
Author
Benjamin Kögel
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Amin Abbaszadehbanaeiyan
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Petter Westbergh
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Åsa Haglund
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Johan Gustavsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Jörgen Bengtsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Erik Haglund
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Henrik Frederiksen
Chalmers, Microtechnology and Nanoscience (MC2), Nanofabrication Laboratory
P. Debernardi
Consiglo Nazionale Delle Richerche
Anders Larsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Semiconductor Laser Conference (ISLC), 2010 22nd IEEE International
0899-9406 (ISSN)
978-1-4244-5683-3 (ISBN)
Subject Categories
Telecommunications
DOI
10.1109/ISLC.2010.5642636
ISBN
978-1-4244-5683-3