Applications of aluminium nitride films deposited by reactive sputtering to silicon-on-insulator materials
Journal article, 1996


Stefan Bengtsson

Mats Bergh

Manolis Choumas

Department of Solid State Electronics

Christian Olesen

Kjell Jeppson

Department of Solid State Electronics

Japanese Journal Of Applied Physics Part 1-Regular Papers Short Notes & Review Papers

Vol. 35 8 4175-4181

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

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