2D laser beamsteering by integration of MEMS and diffractive optics
Paper in proceeding, 2006
Author
Karin Hedsten
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Peter Modh
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Jörgen Bengtsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
David Karlén
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Katrin Persson
Jonas Melin
Richard Nilsson
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Fredrik Nikolajeff
Micro Structure Workshop 2006 (MSW06), Västerås, Sverige, 9-10 maj
59-C2a
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering