(Cl2:Ar) ICP/RIE dry etching of Al(Ga)Sb for AlSb/InAs HEMTs
Paper in proceedings, 2007

Author

Eric Lefebvre

Chalmers, Microtechnology and Nanoscience (MC2)

Malin Borg

Chalmers, Microtechnology and Nanoscience (MC2)

Mikael Malmkvist

Chalmers, Microtechnology and Nanoscience (MC2)

Jan Grahn

Chalmers, Microtechnology and Nanoscience (MC2)

Ludovic Desplanque

Xavier Wallart

Yannick Roelens

Gilles Dambrine

Alain Cappy

Sylvain Bollaert

Proc. 19th Indium Phosphide and Related Materials

pp. 125-128

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/8/2017