Assessment of Various Epitaxial Lift-off Methods for Heterostructure Barrier Varactor
Paper in proceeding, 2010
HBV
wafer bonding
epitaxial lift-off techniques
Author
Mohammad Hadi Tavakoli Dastjerdi
Chalmers, Applied Physics, Physical Electronics
Anke Sanz-Velasco
Chalmers, Applied Physics, Electronics Material and Systems
Josip Vukusic
Chalmers, Applied Physics, Physical Electronics
Jan Stake
Chalmers, Applied Physics, Physical Electronics
GigaHertz Symposium 2010
72-
Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Infrastructure
Nanofabrication Laboratory
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering