Growth and characterization of epitaxial ultra-thin NbN films on 3C-SiC/Si substrate for terahertz applications
Artikel i vetenskaplig tidskrift, 2011

We report on electrical properties and microstructure of epitaxial thin NbN films grown on 3C-SiC/Si substrates by means of reactive magnetron sputtering. A complete epitaxial growth at the NbN/3C-SiC interface has been confirmed by means of high resolution transmission electron microscopy (HRTEM) along with x-ray diffractometry (XRD). Resistivity measurements of the films have shown that the superconducting transition onset temperature (TC) for the best specimen is 11.8 K. Using these epitaxial NbN films, we have fabricated submicron-size hot-electron bolometer (HEB) devices on 3C-SiC/Si substrate and performed their complete DC characterization. The observed critical temperature TC = 11.3 K and critical current density of about 2.5 MA cm−2 at 4.2 K of the submicron-size bridges were uniform across the sample. This suggests that the deposited NbN films possess the necessary homogeneity to sustain reliable hot-electron bolometer device fabrication for THz mixer applications.

thin films

THz

superconductor

epitaxial growth

hot electron bomometer

NbN

Författare

Dimitar Milkov Dochev

Chalmers, Rymd- och geovetenskap, Avancerad mottagarutveckling

Vincent Desmaris

Chalmers, Rymd- och geovetenskap, Avancerad mottagarutveckling

Alexey Pavolotskiy

Chalmers, Rymd- och geovetenskap, Avancerad mottagarutveckling

Denis Meledin

Chalmers, Rymd- och geovetenskap, Avancerad mottagarutveckling

Zonghe Lai

Chalmers, Mikroteknologi och nanovetenskap (MC2), Nanotekniklaboratoriet

Anne Henry

Linköpings universitet

Erik Janzén

Linköpings universitet

E. Pippel

Max Planck-institutet

J Woltersdorf

Max Planck-institutet

Victor Belitsky

Chalmers, Rymd- och geovetenskap, Avancerad mottagarutveckling

Superconductor Science and Technology

0953-2048 (ISSN) 1361-6668 (eISSN)

Vol. 24 035016 (6pp)- 035016

Advanced Radio Astronomy in Europe (RADIONET-FP7)

Europeiska kommissionen (FP7), 2009-01-01 -- 2012-06-30.

Styrkeområden

Nanovetenskap och nanoteknik

Materialvetenskap

Ämneskategorier

Den kondenserade materiens fysik

DOI

10.1088/0953-2048/24/3/035016