Growth of GaSb1-xBix by molecular beam epitaxy
Artikel i vetenskaplig tidskrift, 2012

Molecular beam epitaxy for GaSb1-xBix is investigated in this article. The growth window for incorporation of Bi in GaSb was found. Strategies of avoiding formation of Bi droplets and enhancing Bi incorporation were studied. The Bi incorporation was confirmed by SIMS and RBS measurements. The Bi concentration in the samples was found to increase with increasing growth temperature and Bi flux. The position of GaSb1-xBix layer peak in XRD rocking curves is found to be correlated to Bi composition. Surface and structural properties of the samples were also investigated. Samples grown on GaSb and GaAs substrates were compared and no apparent difference for Bi incorporation was found.

bismuth alloys

Rutherford backscattering

silicon alloys

gallium alloys

secondary ion mass spectra

molecular beam epitaxial growth

X-ray diffraction

Författare

Yuxin Song

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Shu Min Wang

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Ivy Saha Roy

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Peixiong Shi

Anders Hallen

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

1071-1023 (ISSN)

Vol. 30 Art. no. 02B114-

Styrkeområden

Nanovetenskap och nanoteknik

Materialvetenskap

Ämneskategorier

Telekommunikation

Annan materialteknik

DOI

10.1116/1.3672025