Development of planar schottky diodes
Paper i proceeding, 2011

We present the development of an air-bridged planar Schottky diode process at Chalmers University of Technology for use in submillimeter wave mixer and multiplier circuits. As a first step evaluation has been targeted for heterodyne receivers (atmosphere sounders) operation at 340 GHz. The aim is to develop a reliable and repeatable discrete Schottky diode process, with good electrical and mechanical characteristics, which also can be scaled to smaller anodes and extended to integrated diode circuits for THz frequencies. Air-bridged Schottky structures were demonstrated in the late 1980's as a reliable, high quality alternative to whisker contacted diodes. This approach gives a mechanically stable structure and still low parasitic capacitances. The Chalmers diode process is based on electron beam lithography, with a beam spot less than 5 nm, which allows for precise anode and airdridge formation. Hence, this process module can also be utilized for submicron size anodes and. terahertz monolithic integrated circuits (TMICs). Several batches with different shapes of anodes have been fabricated and evaluated with respect to DC/RF-performance. Repeatability of the diode's characteristics indicates good control of the diode fabrication process. We will present the main fabrication route, optimization and repeatability of the diodes as well as RF results from mixer and multiplier measurements up to 340 GHz.

Författare

Vladimir Drakinskiy

Chalmers, Mikroteknologi och nanovetenskap (MC2), Terahertz- och millimetervågsteknik

Peter Sobis

Chalmers, Mikroteknologi och nanovetenskap (MC2), Terahertz- och millimetervågsteknik

Aik-Yean Tang

Chalmers, Mikroteknologi och nanovetenskap (MC2), Terahertz- och millimetervågsteknik

Tomas Bryllert

Chalmers, Mikroteknologi och nanovetenskap (MC2), Terahertz- och millimetervågsteknik

Jan Stake

Chalmers, Mikroteknologi och nanovetenskap (MC2), Terahertz- och millimetervågsteknik

22nd International Symposium on Space Terahertz Technology 2011, ISSTT 2011; Tucson, AZ; United States; 25 April 2011 through 28 April 2011

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Informations- och kommunikationsteknik

Nanovetenskap och nanoteknik

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Elektroteknik och elektronik

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2017-10-07