Multi-wavelength VCSEL arrays using high-contrast gratings
Paper i proceeding, 2017

The use of a high-contrast grating (HCG) as the top mirror in a vertical-cavity surface-emitting laser (VCSEL) allows for setting the resonance wavelength by the grating parameters in a post-epitaxial growth fabrication process. Using this technique, we demonstrate electrically driven multi-wavelength VCSEL arrays at ∼980 nm wavelength. The VCSELs are GaAs-based and the suspended GaAs HCGs were fabricated using electron-beam lithography, dry etching and selective removal of an InGaP sacrificial layer. The air-coupled cavity design enabled 4-channel arrays with 5 nm wavelength spacing and sub-mA threshold currents thanks to the high HCG reflectance.

optical interconnect

vertical-cavity surface-emitting laser

high-contrast grating

wavelength multiplexing

Författare

Erik Haglund

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Johan Gustavsson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

W. V. Sorin

Hewlett Packard Enterprise

Jörgen Bengtsson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

David Fattal

LEIA Inc.

Åsa Haglund

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

M. R. Tan

Hewlett Packard Enterprise

Anders Larsson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Proceedings of SPIE - The International Society for Optical Engineering

0277786X (ISSN) 1996756X (eISSN)

Vol. 10113 101130B

Ämneskategorier

Atom- och molekylfysik och optik

DOI

10.1117/12.2256348

ISBN

978-1-5106-0667-8