Multi-wavelength VCSEL arrays using high-contrast gratings
Paper i proceeding, 2017

The use of a high-contrast grating (HCG) as the top mirror in a vertical-cavity surface-emitting laser (VCSEL) allows for setting the resonance wavelength by the grating parameters in a post-epitaxial growth fabrication process. Using this technique, we demonstrate electrically driven multi-wavelength VCSEL arrays at ∼980 nm wavelength. The VCSELs are GaAs-based and the suspended GaAs HCGs were fabricated using electron-beam lithography, dry etching and selective removal of an InGaP sacrificial layer. The air-coupled cavity design enabled 4-channel arrays with 5 nm wavelength spacing and sub-mA threshold currents thanks to the high HCG reflectance.

optical interconnect

vertical-cavity surface-emitting laser

high-contrast grating

wavelength multiplexing

Författare

Erik Haglund

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Johan Gustavsson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

W. V. Sorin

Hewlett-Packard Company

Jörgen Bengtsson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

David Fattal

LEIA Inc.

Åsa Haglund

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

M. R. Tan

Hewlett-Packard Company

Anders Larsson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Proceedings of SPIE - The International Society for Optical Engineering

0277786X (ISSN) 1996756X (eISSN)

Vol. 10113 101130B

Ämneskategorier

Atom- och molekylfysik och optik

DOI

10.1117/12.2256348

ISBN

978-1-5106-0667-8

Mer information

Senast uppdaterat

2018-07-02