Investigation of palladium current collectors for vertical graphene-based microsupercapacitors
Paper i proceeding, 2019

As microsystems are reduced in size and become integrated in the Internet of Things (IoT), they require an adequate power supply which can be integrated at the same size scale. Microsupercapacitors (MSCs), if coupled with on-chip harvesters, can offer solutions for a self-sustaining, on-chip power supply. However, the implementation of reliable MSC wafer-scale production compatible with CMOS technology remains a challenge. Palladium (Pd) is known as a CMOS compatible metal and, in this paper, we investigate the use of Pd as a contact material for vertical graphene (VG) electrodes in wafer-scale MSC fabrication. We show that a Ti diffusion barrier is required to prevent short-circuiting for the successful employment of Pd contacts. The fabricated MSCs demonstrate a capacitance of 1.3 μF/cm2 with an energy density of 0.42 μJ/cm2. Thus, utilization of a Ti diffusion barrier with a CMOS compatible Pd metal electrode is a step towards integrating MSCs in semiconductor microsystems.

Författare

Agin Vyas

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

F. Cornaglia

Student vid Chalmers

T. Rattanasawatesun

Student vid Chalmers

Qi Li

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Mohammad Mazharul Haque

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Jie Sun

Chalmers, Mikroteknologi och nanovetenskap (MC2), Kvantkomponentfysik

Volodymyr Kuzmenko

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Anderson David Smith

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Per Lundgren

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

Journal of Physics: Conference Series

17426588 (ISSN) 17426596 (eISSN)

Vol. 1319 1 012007

29th Micromechanics and Microsystem Europe Workshop, MME 2018
Bratislava, Slovakia,

Ämneskategorier

Nanoteknik

Annan elektroteknik och elektronik

DOI

10.1088/1742-6596/1319/1/012007

Mer information

Senast uppdaterat

2020-04-01