Investigation of palladium current collectors for vertical graphene-based microsupercapacitors
Paper in proceedings, 2019

As microsystems are reduced in size and become integrated in the Internet of Things (IoT), they require an adequate power supply which can be integrated at the same size scale. Microsupercapacitors (MSCs), if coupled with on-chip harvesters, can offer solutions for a self-sustaining, on-chip power supply. However, the implementation of reliable MSC wafer-scale production compatible with CMOS technology remains a challenge. Palladium (Pd) is known as a CMOS compatible metal and, in this paper, we investigate the use of Pd as a contact material for vertical graphene (VG) electrodes in wafer-scale MSC fabrication. We show that a Ti diffusion barrier is required to prevent short-circuiting for the successful employment of Pd contacts. The fabricated MSCs demonstrate a capacitance of 1.3 μF/cm2 with an energy density of 0.42 μJ/cm2. Thus, utilization of a Ti diffusion barrier with a CMOS compatible Pd metal electrode is a step towards integrating MSCs in semiconductor microsystems.

Author

Agin Vyas

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

F. Cornaglia

Student at Chalmers

T. Rattanasawatesun

Student at Chalmers

Qi Li

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Mohammad Mazharul Haque

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Jie Sun

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Volodymyr Kuzmenko

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Anderson David Smith

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Per Lundgren

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Peter Enoksson

Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems Laboratory

Journal of Physics: Conference Series

17426588 (ISSN) 17426596 (eISSN)

Vol. 1319 1 012007

29th Micromechanics and Microsystem Europe Workshop, MME 2018
Bratislava, Slovakia,

Subject Categories

Nano Technology

Other Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1088/1742-6596/1319/1/012007

More information

Latest update

4/1/2020 1