Suspended photonic crystal membranes in AlGaAs heterostructures for integrated multi-element optomechanics
Artikel i vetenskaplig tidskrift, 2020

We present high-reflectivity mechanical resonators fabricated from AlGaAs heterostructures for use in free-space optical cavities operating in the telecom wavelength regime. The mechanical resonators are fabricated in slabs of GaAs and patterned with a photonic crystal to increase their out-of-plane reflectivity. Characterization of the mechanical modes reveals residual tensile stress in the GaAs device layer. This stress results in higher mechanical frequencies than in unstressed GaAs and can be used for strain engineering of mechanical dissipation. Simultaneously, we find that the finite waist of the incident optical beam leads to a dip in the reflectance spectrum. This feature originates from coupling to a guided resonance of the photonic crystal, an effect that must be taken into account when designing slabs of finite size. The single-layer and sub-mu m-spaced double-layer slabs demonstrated here can be directly fabricated on top of a distributed Bragg reflector mirror in the same material platform. Such a platform opens a route for realizing integrated multi-element cavity optomechanical devices and optomechanical microcavities on chip.


Sushanth Kini

Chalmers, Mikroteknologi och nanovetenskap (MC2), Kvantteknologi

Karim Elkhouly

Interuniversitair Micro-Elektronica Centrum (IMEC)

Jamie Fitzgerald

Chalmers, Fysik, Kondenserad materie- och materialteori

Martin Ekman

Student vid Chalmers

Yanchao Zhang

Zhejiang Supermat Sen Ray Technol

Fan Zhang

Zhejiang Supermat Sen Ray Technol

Shu Min Wang

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Philippe Tassin

Chalmers, Fysik, Kondenserad materie- och materialteori

Witlef Wieczorek

Chalmers, Mikroteknologi och nanovetenskap (MC2), Kvantteknologi

Applied Physics Letters

0003-6951 (ISSN) 1077-3118 (eISSN)

Vol. 116 26 0012667


Nanovetenskap och nanoteknik (SO 2010-2017, EI 2018-)


Atom- och molekylfysik och optik

Annan fysik

Annan materialteknik



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