Spin-Coated Heterogenous Stacked Electrodes for Performance Enhancement in CMOS-Compatible On-Chip Microsupercapacitors
Artikel i vetenskaplig tidskrift, 2022

Integration of microsupercapacitors (MSCs) with on-chip sensors and actuators with nanoenergy harvesters can improve the lifetime of wireless sensor nodes in an Internet-of-Things (IoT) architecture. However, to be easy to integrate with such harvester technology, MSCs should be fabricated through a complementary-metal-oxide-semiconductor (CMOS) compatible technology, ubiquitous in electrode choice with the capability of heterogeneous stacking of electrodes for modulation in properties driven by application requirements. In this article, we address both these issues through fabrication of multielectrode modular, high energy density microsupercapacitors (MSC) containing reduced graphene oxide (GO), GO-heptadecane-9-amine (GO-HD9A), rGO-octadecylamine (rGO-ODA), and rGO-heptadecane-9-amine (rGO-HD9A) that stack through a scalable, CMOS compatible, high-wafer-yield spin-coating process. Furthermore, we compare the performance of the stack with individual electrode MSCs fabricated through the same process. The individual electrodes, in the presence of 1-ethyl-3-methylimidazolium bis(trifluoromethylsulfony)imide (EMIM-TFSI), demonstrate a capacitance of 38, 30, 36, and 105 μF/cm^2 at 20 mV/s^1 whereas the fabricated stack of electrodes demonstrates a high capacitance of 280 μF/cm^2 at 20 mV/s^1 while retaining and enhancing the material-dependent capacitance, charge retention, and power density.

modular

microsupercapacitors

CMOS

graphene

MEMS

stacking

spin coated

Författare

Agin Vyas

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Simin Zare Hajibagher

Student vid Chalmers

Ulises Mendez Romero

Chalmers, Kemi och kemiteknik, Tillämpad kemi, Ergang Wang Group

Shameel Thurakkal

Chalmers, Kemi och kemiteknik, Kemi och biokemi

Qi Li

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Mohammad Mazharul Haque

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Azega Rajendra Babu Kalai Arasi

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Ergang Wang

Chalmers, Kemi och kemiteknik, Tillämpad kemi, Ergang Wang Group

Xiaoyan Zhang

Chalmers, Kemi och kemiteknik, Kemi och biokemi

Per Lundgren

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

Enoaviatech AB

Anderson David Smith

Chalmers, Mikroteknologi och nanovetenskap, Elektronikmaterial

ACS Applied Energy Materials

25740962 (eISSN)

Vol. In Press

Drivkrafter

Hållbar utveckling

Styrkeområden

Transport

Ämneskategorier

Textil-, gummi- och polymermaterial

Materialkemi

Annan kemiteknik

Infrastruktur

Nanotekniklaboratoriet

DOI

10.1021/acsaem.1c03745

Mer information

Senast uppdaterat

2022-04-20