Spin-Coated Heterogenous Stacked Electrodes for Performance Enhancement in CMOS-Compatible On-Chip Microsupercapacitors
Journal article, 2022
Integration of microsupercapacitors (MSCs) with on-chip sensors and actuators with nanoenergy harvesters can improve the lifetime of wireless sensor nodes in an Internet-of-Things (IoT) architecture. However, to be easy to integrate with such harvester technology, MSCs should be fabricated through a complementary-metal-oxide-semiconductor (CMOS) compatible technology, ubiquitous in electrode choice with the capability of heterogeneous stacking of electrodes for modulation in properties driven by application requirements. In this article, we address both these issues through fabrication of multielectrode modular, high energy density microsupercapacitors (MSC) containing reduced graphene oxide (GO), GO-heptadecane-9-amine (GO-HD9A), rGO-octadecylamine (rGO-ODA), and rGO-heptadecane-9-amine (rGO-HD9A) that stack through a scalable, CMOS compatible, high-wafer-yield spin-coating process. Furthermore, we compare the performance of the stack with individual electrode MSCs fabricated through the same process. The individual electrodes, in the presence of 1-ethyl-3-methylimidazolium bis(trifluoromethylsulfony)imide (EMIM-TFSI), demonstrate a capacitance of 38, 30, 36, and 105 μF/cm^2 at 20 mV/s^1 whereas the fabricated stack of electrodes demonstrates a high capacitance of 280 μF/cm^2 at 20 mV/s^1 while retaining and enhancing the material-dependent capacitance, charge retention, and power density.
modular
microsupercapacitors
CMOS
graphene
MEMS
stacking
spin coated
Author
Agin Vyas
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Simin Zare Hajibagher
Student at Chalmers
Ulises Mendez Romero
Chalmers, Chemistry and Chemical Engineering, Applied Chemistry
Shameel Thurakkal
Chalmers, Chemistry and Chemical Engineering, Chemistry and Biochemistry
Qi Li
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Mohammad Mazharul Haque
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Azega Rajendra Babu Kalai Arasi
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Ergang Wang
Chalmers, Chemistry and Chemical Engineering, Applied Chemistry
Xiaoyan Zhang
Chalmers, Chemistry and Chemical Engineering, Chemistry and Biochemistry
Per Lundgren
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
Enoaviatech AB
Anderson David Smith
Chalmers, Microtechnology and Nanoscience (MC2), Electronics Material and Systems
ACS Applied Energy Materials
25740962 (eISSN)
Vol. 5 4 4221-4231Driving Forces
Sustainable development
Areas of Advance
Transport
Subject Categories
Textile, Rubber and Polymeric Materials
Materials Chemistry
Other Chemical Engineering
Infrastructure
Nanofabrication Laboratory
DOI
10.1021/acsaem.1c03745