Interlaboratory investigation of on-wafer S-parameter measurements from 110 GHz to 1.1 THz
Paper i proceeding, 2023
This paper presents an interlaboratory comparison of on-wafer S-parameter measurements of coplanar waveguide (CPW) devices in the frequency range of 110 GHz to 1.1 THz. The comparison was conducted using bespoke calibration standards and verification devices fabricated from high resistivity Silicon. In this study, nine well-established measurement laboratories were involved, and the measurements were performed at different laboratories using different equipment but the same calibration method, i.e. multiline TRL (mTRL). The results show reasonable consistency across a wide frequency range. Observations on the results are provided, along with discussions of factors that may impact interlaboratory reproducibility at such high frequencies.
On wafer measurement
terahertz
measurement comparison
millimetre-wave
coplanar waveguide
S-parameter
Författare
Xiaobang Shang
National Physical Laboratory (NPL)
Nick Ridler
National Physical Laboratory (NPL)
Uwe Arz
Physikalisch-Technische Bundesanstalt (PTB)
Gia Ngoc Phung
Physikalisch-Technische Bundesanstalt (PTB)
Isabelle Roch-Jeune
Université de Lille
Guillaume Ducournau
Université de Lille
Kamel Haddadi
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
Thomas Flisgen
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
Ralf Doerner
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
Djamel Allal
Laboratoire National De Metrologie Et D'essais
Divya Jayasankar
RISE Research Institutes of Sweden
Chalmers, Mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik
Jan Stake
Chalmers, Mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik
Robin Schimdt
Keysight Technologies, Keysight Laboratories
Gavin Fisher
FormFactor GmbH
Faisal Mubarak
Dutch National Metrology Institute
53rd European Microwave Conference
624-627
9782874870729 (ISBN)
53rd European Microwave Conference
Berlin, Germany,
Berlin, Germany,
Uppgradering av den nationella infrastrukturen för terahertzkarakterisering för att möjliggöra nästa generation trådlösa tillämpningar och instrument för fjärranalys
Vetenskapsrådet (VR) (2020-06187), 2021-01-01 -- 2024-12-31.
Traceability for electrical measurements at millimetre-wave and terahertz frequencies for communications and electronics technologies (TEMMT)
European Association of National Metrology Institutes (EURAMET) (18SIB09), 2019-05-01 -- 2022-04-30.
THz-metrologi för moderna trådlösa system
Stiftelsen för Strategisk forskning (SSF) (FID17-0040), -- .
Styrkeområden
Informations- och kommunikationsteknik
Infrastruktur
Kollberglaboratoriet
Ämneskategorier (SSIF 2011)
Elektroteknik och elektronik
Reglerteknik
Annan elektroteknik och elektronik
DOI
10.23919/EuMC58039.2023.10290550