Interlaboratory investigation of on-wafer S-parameter measurements from 110 GHz to 1.1 THz
Paper in proceeding, 2023
This paper presents an interlaboratory comparison of on-wafer S-parameter measurements of coplanar waveguide (CPW) devices in the frequency range of 110 GHz to 1.1 THz. The comparison was conducted using bespoke calibration standards and verification devices fabricated from high resistivity Silicon. In this study, nine well-established measurement laboratories were involved, and the measurements were performed at different laboratories using different equipment but the same calibration method, i.e. multiline TRL (mTRL). The results show reasonable consistency across a wide frequency range. Observations on the results are provided, along with discussions of factors that may impact interlaboratory reproducibility at such high frequencies.
S-parameter
terahertz
measurement comparison
On wafer measurement
coplanar waveguide
millimetre-wave
Author
Xiaobang Shang
National Physical Laboratory (NPL)
Nick Ridler
National Physical Laboratory (NPL)
Uwe Arz
Physikalisch-Technische Bundesanstalt (PTB)
Gia Ngoc Phung
Physikalisch-Technische Bundesanstalt (PTB)
Isabelle Roch-Jeune
University of Lille
Guillaume Ducournau
University of Lille
Kamel Haddadi
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
Thomas Flisgen
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
Ralf Doerner
Ferdinand-Braun-Institut fur Hochstfrequenztechnik
Djamel Allal
Laboratoire National De Metrologie Et D'essais (LNE)
Divya Jayasankar
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
RISE Research Institutes of Sweden
Jan Stake
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
Robin Schimdt
Keysight Technologies, Keysight Laboratories
Gavin Fisher
FormFactor GmbH
Faisal Mubarak
Dutch National Metrology Institute
53rd European Microwave Conference
624-627
9782874870729 (ISBN)
53rd European Microwave Conference
Berlin, Germany,
Berlin, Germany,
THz metrology for modern wireless systems
Swedish Foundation for Strategic Research (SSF) (FID17-0040), -- .
Traceability for electrical measurements at millimetre-wave and terahertz frequencies for communications and electronics technologies (TEMMT)
European Association of National Metrology Institutes (EURAMET) (18SIB09), 2019-05-01 -- 2022-04-30.
Areas of Advance
Information and Communication Technology
Infrastructure
Kollberg Laboratory
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
Control Engineering
Other Electrical Engineering, Electronic Engineering, Information Engineering
DOI
10.23919/EuMC58039.2023.10290550