A calibration-free method to assess the quality of standards for THz on-wafer measurements
Paper i proceeding, 2022

A method to assess the quality of the calibration standards has been developed and tested. The actual response of the tested transmission lines for LRRM-16 calibration approach has been simulated in HFSS environment, fabricated, and tested with on-wafer measurement setup. The method for quality assessment is based on the properties of similar matrices, that compares traces and determinants of the S-parameters products for fabricated and simulated structures.

Författare

Maxim Masyukov

Aalto-Yliopisto

Irina Nefedova

Aalto-Yliopisto

Aleksi Tamminen

Aalto-Yliopisto

Kimmo Silvonen

Aalto-Yliopisto

Juan Cabello Sánchez

Chalmers, Mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik

Mikko Varonen

Teknologian Tutkimuskeskus (VTT)

Mikko Kantanen

Teknologian Tutkimuskeskus (VTT)

Helena Rodilla

Chalmers, Mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik

Jan Stake

Chalmers, Mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik

Zachary Taylor

Aalto-Yliopisto

International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz

21622027 (ISSN) 21622035 (eISSN)

Vol. 2022-August
9781728194271 (ISBN)

2022 47th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)
Delft, Netherlands,

Styrkeområden

Informations- och kommunikationsteknik

Infrastruktur

Kollberglaboratoriet

Ämneskategorier

Övrig annan teknik

Elektroteknik och elektronik

DOI

10.1109/IRMMW-THz50927.2022.9895704

Mer information

Senast uppdaterat

2024-07-17