Wafer bonding strength increased by mobile ions
Paper i proceeding, 2009

Mechanical bonding energies of oxygen plasma treated and room temperature wafer bonded silicon surfaces have been measured as a function of storage time in parallel with measurements of electrical interface properties. We find that the surface energy increases with a time dependence similar to that of decreasing interface state concentration. The current versus voltage behaviour reveals the existence of mobile ions. We conclude that these mobile charges after reaction with the interface states give rise to the increased surface energy responsible for the bonding.


Bahman Raeissi

Chalmers, Teknisk fysik, Fysikalisk elektronik

Anke Sanz-Velasco

Chalmers, Teknisk fysik, Elektronikmaterial

Olof Engström

Chalmers, Teknisk fysik, Fysikalisk elektronik

Proceeding of EUROSOI 2009



Elektroteknik och elektronik

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