Mats Hagberg
Showing 9 publications
High-Throughput On-Chip Large Deformation of Silicon Nanoribbons and Nanowires
Anisotropic vapor HF etching of silicon dioxide for Si microstructure release
Black silicon with high density and high aspect ratio nanowhiskers
Note: Fast and reliable fracture strain extraction technique applied to silicon at nanometer scale
Controlled thinning and surface smoothening of silicon nanopillars
Fabrication and Characterization of Integration Compatible Semiconductor Lasers
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