Mats Hagberg

Researcher at Chalmers, Microtechnology and Nanoscience (MC2), Nanofabrication Laboratory

Showing 8 publications

2012

Anisotropic vapor HF etching of silicon dioxide for Si microstructure release

V. Passi, Ulf Södervall, Bengt Nilsson et al
Microelectronic Engineering. Vol. 95, p. 83-89
Journal article
2012

High-Throughput On-Chip Large Deformation of Silicon Nanoribbons and Nanowires

V. Passi, U. Bhaskar, T. Pardoen et al
Journal of Microelectromechanical Systems. Vol. 21 (4), p. 822-829
Journal article
2011

Microscopic Si whiskers

S. Kalem, P. Werner, Mats Hagberg et al
Microelectronic Engineering. Vol. 88 (8), p. 2593-2596
Journal article
2011

On-chip tensile testing of the mechanical and electro-mechanical properties of nano-scale silicon free-standing beams

U. Bhaskar, V. Passi, Ulf Södervall et al
Advanced Materials Research. Vol. 276, p. 117-126
Journal article
2011

Note: Fast and reliable fracture strain extraction technique applied to silicon at nanometer scale

V. Passi, U. Bhaskar, T. Pardoen et al
Review of Scientific Instruments. Vol. 82 (11), p. art. no 116106-
Journal article
2011

Controlled thinning and surface smoothening of silicon nanopillars

S. Kalem, P. Werner, Bengt Nilsson et al
Nanotechnology. Vol. 20 (44), p. 445303-
Journal article
2011

Black silicon with high density and high aspect ratio nanowhiskers

S. Kalem, P. Werner, Örjan Arthursson et al
Nanotechnology. Vol. 22 (23)
Journal article

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