Mats Hagberg
Showing 9 publications
High-Throughput On-Chip Large Deformation of Silicon Nanoribbons and Nanowires
Anisotropic vapor HF etching of silicon dioxide for Si microstructure release
Note: Fast and reliable fracture strain extraction technique applied to silicon at nanometer scale
Black silicon with high density and high aspect ratio nanowhiskers
Controlled thinning and surface smoothening of silicon nanopillars
Fabrication and Characterization of Integration Compatible Semiconductor Lasers
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