Mats Hagberg

Researcher at Nanofabrication Laboratory

Contact Details

Publications (9)
Projects (0)

Showing 9 publications

2024

Platinum vaporization-deposition coated polycarbonate membranes for comprehensive, multimodal, and correlative microscopic analysis of micro-and nanoplastics and other environmental particles

Karin Mattsson, Mats Hagberg, Martin Hassellöv

Talanta. Vol. 269

Journal article

2012

High-Throughput On-Chip Large Deformation of Silicon Nanoribbons and Nanowires

V. Passi, U. Bhaskar, T. Pardoen et al

Journal of Microelectromechanical Systems. Vol. 21 (4), p. 822-829

Journal article

2012

Anisotropic vapor HF etching of silicon dioxide for Si microstructure release

V. Passi, Ulf Södervall, Bengt Nilsson et al

Microelectronic Engineering. Vol. 95, p. 83-89

Journal article

2011

Microscopic Si whiskers

S. Kalem, P. Werner, Mats Hagberg et al

Microelectronic Engineering. Vol. 88 (8), p. 2593-2596

Journal article

2011

Note: Fast and reliable fracture strain extraction technique applied to silicon at nanometer scale

V. Passi, U. Bhaskar, T. Pardoen et al

Review of Scientific Instruments. Vol. 82 (11), p. art. no 116106-

Journal article

2011

Black silicon with high density and high aspect ratio nanowhiskers

S. Kalem, P. Werner, Örjan Arthursson et al

Nanotechnology. Vol. 22 (23)

Journal article

2011

On-chip tensile testing of the mechanical and electro-mechanical properties of nano-scale silicon free-standing beams

U. Bhaskar, V. Passi, Ulf Södervall et al

Advanced Materials Research. Vol. 276, p. 117-126

Journal article

2011

Controlled thinning and surface smoothening of silicon nanopillars

S. Kalem, P. Werner, Bengt Nilsson et al

Nanotechnology. Vol. 20 (44), p. 445303-

Journal article

1994

Fabrication and Characterization of Integration Compatible Semiconductor Lasers

Mats Hagberg

Doctoral thesis

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