thin film
monolithic integrated circuits
mmic process
electrical resistivity
resistors
titanium compounds
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
Chalmers, Microtechnology and Nanoscience (MC2), Microwave Electronics
2166-2754 (ISSN)
Vol. 28 5 912-915Electrical Engineering, Electronic Engineering, Information Engineering
Other Electrical Engineering, Electronic Engineering, Information Engineering
10.1116/1.3475532