Integrated Tunable VCSELs With Simple MEMS Technology
Paper in proceedings, 2010

A simple MEMS technology for wafer-scale fabrication of tunable VCSELs is presented. Reflown photo-resist droplets serve as preform for making curved movable micro-mirrors. First devices show a tuning range of 15 nm with mW-output power.

Author

Benjamin Kögel

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Amin Abbaszadehbanaeiyan

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Petter Westbergh

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Åsa Haglund

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Johan Gustavsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Jörgen Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Erik Haglund

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Henrik Frederiksen

Chalmers, Microtechnology and Nanoscience (MC2), Nanofabrication Laboratory

P. Debernardi

Consiglo Nazionale Delle Richerche

Anders Larsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Semiconductor Laser Conference (ISLC), 2010 22nd IEEE International

0899-9406 (ISSN)

Subject Categories

Telecommunications

DOI

10.1109/ISLC.2010.5642636

ISBN

978-1-4244-5683-3

More information

Latest update

9/6/2018 1