Singlemode tunable VCSELs with integrated MEMS technology
Paper in proceedings, 2011

A simple MEMS technology for wafer-scale integration of short-wavelength tunable VCSELs is presented. Using a 3D model the half-symmetric cavity is optimized for singlemode emission from 10 μm large apertures over 12 nm tuning range.

VCSEL

tunable laser

MEMS

vertical-cavity surface-emitting laser

Microelectromechanical system

Author

Benjamin Kögel

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

P. Debernardi

Petter Westbergh

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Åsa Haglund

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Johan Gustavsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Jörgen Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Erik Haglund

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Anders Larsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

European Conference on Laser and Electro-Optics (CLEO/Europe)

Areas of Advance

Information and Communication Technology

Subject Categories

Telecommunications

Atom and Molecular Physics and Optics

More information

Created

10/7/2017