Integrated MEMS-tunable VCSELs for reconfigurable optical interconnects
Paper in proceedings, 2012

A simple and low-cost technology for tunable vertical-cavity surface-emitting lasers (VCSELs) with curved movable micromirror is presented. The micro-electro-mechanical system (MEMS) is integrated with the active optical component (so-called half-VCSEL) by means of surface-micromachining, using a reflown photoresist droplet as sacrificial layer. The technology is demonstrated for electrically pumped, short-wavelength (850nm) tunable VCSEts. Fabricated devices with 10 mu m oxide aperture are singlemode with sidemode suppression >35 dB, tunable over 24 mit with output power up to 0.5 mW, and have a beam divergence angle <6 degrees. An improved high-speed design with redneed parasitic capaciLt-triCe enables direct modulaion WiLh 3dB-bandwidths up to 6 GHz mid error-free data transmission at 5 Gbit/s. The modulation response of the MEMS under elect rothermal actuation has a bandwidth of 400Hz corresponding to switching times of about 10ms. The thermal crosstalk between MEMS and half-VCSEL is negligible and not degrading the device performance. With these characteristics the integrated MEMS-tunable VCSELs are basically suitable for use in reconfigurable optical interconnects and ready for test in a prototype system. Schemes for improving output power, tuning speed, and modulation bandwidth are briefly discussed.

surface-emitting laser (VCSEL)

reconfigurable optical interconnects

micro-electro-mechanical systems (MEMS)

vertical-cavity

wafer-scale integration

tunable laser

Author

Benjamin Kögel

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

P. Debernardi

Polytechnic University of Turin

Petter Westbergh

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Johan Gustavsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Åsa Haglund

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Erik Haglund

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Jörgen Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Anders Larsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Proceedings of SPIE - The International Society for Optical Engineering

0277786X (ISSN)

Vol. 8276 Article Number: 82760Q- 82760Q

Subject Categories

Physical Sciences

DOI

10.1117/12.908420

ISBN

978-0-81948-919-7

More information

Latest update

8/28/2018