Integrated MEMS-tunable VCSELs for reconfigurable optical interconnects
Paper i proceeding, 2012

A simple and low-cost technology for tunable vertical-cavity surface-emitting lasers (VCSELs) with curved movable micromirror is presented. The micro-electro-mechanical system (MEMS) is integrated with the active optical component (so-called half-VCSEL) by means of surface-micromachining, using a reflown photoresist droplet as sacrificial layer. The technology is demonstrated for electrically pumped, short-wavelength (850nm) tunable VCSEts. Fabricated devices with 10 mu m oxide aperture are singlemode with sidemode suppression >35 dB, tunable over 24 mit with output power up to 0.5 mW, and have a beam divergence angle <6 degrees. An improved high-speed design with redneed parasitic capaciLt-triCe enables direct modulaion WiLh 3dB-bandwidths up to 6 GHz mid error-free data transmission at 5 Gbit/s. The modulation response of the MEMS under elect rothermal actuation has a bandwidth of 400Hz corresponding to switching times of about 10ms. The thermal crosstalk between MEMS and half-VCSEL is negligible and not degrading the device performance. With these characteristics the integrated MEMS-tunable VCSELs are basically suitable for use in reconfigurable optical interconnects and ready for test in a prototype system. Schemes for improving output power, tuning speed, and modulation bandwidth are briefly discussed.

surface-emitting laser (VCSEL)

reconfigurable optical interconnects

micro-electro-mechanical systems (MEMS)

vertical-cavity

wafer-scale integration

tunable laser

Författare

Benjamin Kögel

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

P. Debernardi

Politecnico di Torino

Petter Westbergh

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Johan Gustavsson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Åsa Haglund

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Erik Haglund

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Jörgen Bengtsson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Anders Larsson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Fotonik

Proceedings of SPIE - The International Society for Optical Engineering

0277786X (ISSN)

Vol. 8276 Article Number: 82760Q- 82760Q

Ämneskategorier

Fysik

DOI

10.1117/12.908420

ISBN

978-0-81948-919-7

Mer information

Senast uppdaterat

2018-08-28