Paper-mediated controlled densification and low temperature transfer of carbon nanotube forests for electronic interconnect application
Journal article, 2012

We report on the fabrication and characterization of densified and transferred carbon nanotube forests for electronic interconnect application. A simple, low cost and quality method is developed for densifying vertically-aligned carbon nanotube (VA-CNTs) forests at room temperature. Commercially available paper is utilized in this work to serve as a solvent carrier. Highly densified CNT bundles are formed by the sorption of evaporative liquid from the paper into carbon nanotube forests. An average Young’s modulus increase from approximately 15.8 to 111.9 MPa is extrapolated from the measured load–displacement curves in the compression tests of the as-densified VA-CNTs. Subsequent low temperature transfer method is used to transfer the VA-CNT bundles onto the target substrate. Four-probe measurement of the transferred VA-CNTs shows resistance of 3.70 ± 0.04 Ω of each CNT bundle.

Young’s modulus

Post-growth processing

Carbon nanotube resistance

Carbon nanotube

Densification

Carbon nanotube transfer

Author

Di Jiang

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Teng Wang

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Si Chen

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Lilei Ye

SHT Smart High-Tech

Johan Liu

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Microelectronic Engineering

0167-9317 (ISSN)

Vol. 103 Pages 177-180

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology (2010-2017)

Materials Science

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

Nano Technology

Infrastructure

Nanofabrication Laboratory

DOI

10.1016/j.mee.2012.11.007

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3/7/2018 7