Controlling the Density of CNTs by Different UnderlayerMaterials in PECVD Growth
Paper in proceeding, 2013

Author

Liang Xu

Chalmers, Applied Physics, Electronics Material and Systems

Di Jiang

Chalmers, Applied Physics, Electronics Material and Systems

Yifeng Fu

Chalmers, Applied Physics, Electronics Material and Systems

Shantung Tu

Johan Liu

Chalmers, Applied Physics, Electronics Material and Systems

Proceedings of the 19th INTERNATIONAL WORKSHOP on Thermal Investigations of ICs and Systems, September 25-27 2013, Berlin, Germany, IEEE / Therminic 2013

248-252

Areas of Advance

Nanoscience and Nanotechnology

Subject Categories

Nano Technology

DOI

10.1109/THERMINIC.2013.6675185

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Latest update

3/2/2022 6