Controlling the Density of CNTs by Different UnderlayerMaterials in PECVD Growth
Paper in proceeding, 2013
Author
Liang Xu
Chalmers, Applied Physics, Electronics Material and Systems
Di Jiang
Chalmers, Applied Physics, Electronics Material and Systems
Yifeng Fu
Chalmers, Applied Physics, Electronics Material and Systems
Shantung Tu
Johan Liu
Chalmers, Applied Physics, Electronics Material and Systems
Proceedings of the 19th INTERNATIONAL WORKSHOP on Thermal Investigations of ICs and Systems, September 25-27 2013, Berlin, Germany, IEEE / Therminic 2013
248-252
Areas of Advance
Nanoscience and Nanotechnology
Subject Categories
Nano Technology
DOI
10.1109/THERMINIC.2013.6675185