100 GHz SOI Gap Waveguides
Paper in proceedings, 2013

Two gap waveguide technologies, groove and ridge, are presented here for F-band applications. Three different groove gap waveguide devices and four different ridge gap waveguide devices have been fabricated. All of them were micromachined to achieve the feature size required for the frequency band and fabricated in a single process using SOI wafers. The two types provide a more robust coupling to standard waveguides and high frequency probes. Measurements for most of the devices are shown in this paper, showing robust measurements and good agreement with simulations. More measurements need to be done but the initial ones show the promise both in the manufacturing technique and the coupling. © 2013 IEEE.

High-frequency

Ridge

Micromachining

Waveguide

Bed of nails

Gap Waveguide

Groove

Author

Sofia Rahiminejad

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

Astrid Algaba Brazalez

Chalmers, Signals and Systems, Communication and Antenna Systems, Antennas

Syed Hasan Raza Zaidi

Chalmers, Signals and Systems, Communication and Antenna Systems, Antennas

Elena Pucci

Chalmers, Signals and Systems, Communication and Antenna Systems, Antennas

Sjoerd Haasl

Royal Institute of Technology (KTH)

Per-Simon Kildal

Chalmers, Signals and Systems, Communication and Antenna Systems, Antennas

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

510-513

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology (2010-2017)

Transport

Production

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

Nano Technology

Infrastructure

Nanofabrication Laboratory

DOI

10.1109/Transducers.2013.6626815

ISBN

978-146735981-8

More information

Latest update

2/26/2018