Integration of GaAs-based VCSEL array on SiN platform with HCG reflectors for WDM applications
Paper in proceedings, 2015

We present a GaAs-based VCSEL structure, BCB bonded to a Si3N4 waveguide circuit, where one DBR is substituted by a free-standing Si3N4 high-contrast-grating (HCG) reflector realized in the Si3N4 waveguide layer. This design enables solutions for on-chip spectroscopic sensing, and the dense integration of 850-nm WDM data communication transmitters where individual channel wavelengths are set by varying the HCG parameters. RCWA shows that a 300nm-thick Si3N4 HCG with 800nm period and 40% duty cycle reflects strongly (<99%) over a 75nm wavelength range around 850nm. A design with a standing-optical-field minimum at the III-V/airgap interface maximizes the HCG's influence on the VCSEL wavelength, allowing for a 15-nm-wide wavelength setting range with low threshold gain (<1000 cm-1).

silicon photonics

high contrast grating

vertical cavity surface emitting laser

silicon nitride waveguide

integration

Author

Sulakshna Kumari

Ghent university

Johan Gustavsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

R. Wang

Ghent university

Emanuel Haglund

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Petter Westbergh

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

D. Sanchez

Ghent university

Erik Haglund

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Åsa Haglund

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Jörgen Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

N. Le Thomas

Ghent university

Gunther Roelkens

Ghent university

Anders Larsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Roel G. Baets

Ghent university

Proceedings of SPIE - The International Society for Optical Engineering

0277786X (ISSN) 1996756X (eISSN)

Vol. 9372 Art. no. 93720U- 93720U

Subject Categories

Manufacturing, Surface and Joining Technology

Communication Systems

DOI

10.1117/12.2077090

ISBN

978-1-62841-462-2

More information

Latest update

3/6/2018 1