GaAs High-Contrast Gratings with InGaP Sacrificial Layer for Multi-Wavelength VCSEL Arrays
Paper in proceedings, 2016

We report on highly reflective suspended GaAs high-contrast gratings (HCGs) using an InGaP sacrificial layer. A high reflectivity approaching 100% was observed both in direct reflectivity measurement and by low threshold currents in fabricated multi-wavelength HCG-VCSEL arrays.

High-contrast grating (HCG)

InGaP

vertical-cavity surface-emitting laser (VCSEL)

sacrificial layer

Author

Erik Haglund

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Johan Gustavsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

W. V. Sorin

Hewlett-Packard Company

Jörgen Bengtsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

David Fattal

LEIA Inc.

Åsa Haglund

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Anders Larsson

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Michael Tan

Chalmers, Microtechnology and Nanoscience (MC2), Photonics

Conference Digest - IEEE International Semiconductor Laser Conference

08999406 (ISSN)

Vol. TuD2 Article n0 7765746- 7765746

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology (2010-2017)

Subject Categories

Telecommunications

Physical Sciences

Nano Technology

Infrastructure

Nanofabrication Laboratory

ISBN

978-4-8855-2306-9

More information

Latest update

7/27/2018