Scalable Fabrication of Edge Contacts to 2D Materials: Implications for Quantum Resistance Metrology and 2D Electronics
Journal article, 2023
We report a reliable and scalable fabrication method for producing electrical contacts to two-dimensional (2D) materials based on the tri-layer resist system. We demonstrate the applicability of this method in devices fabricated on epitaxial graphene on silicon carbide (epigraphene) used as a scalable 2D material platform. For epigraphene, data on nearly 70 contacts result in median values of the one-dimensional (1D) specific contact resistances ρc ∼ 67 Ω·μm and follow the Landauer quantum limit ρc ∼ n-1/2, consistently reaching values ρc < 50 Ω·μm at high carrier densityn. As a proof of concept, we apply the same fabrication method to the transition metal dichalcogenide (TMDC) molybdenum disulfide (MoS2). Our edge contacts enable MoS2 field-effect transistor (FET) behavior with an ON/OFF ratio of >106 at room temperature (>109 at cryogenic temperatures). The fabrication route demonstrated here allows for contact metallization using thermal evaporation and also by sputtering, giving an additional flexibility when designing electrical interfaces, which is key in practical devices and when exploring the electrical properties of emerging materials.
2D material
edge-contacts
graphene
MoS 2
epitaxial graphene
Author
Naveen Shetty
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Hans He
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
RISE Research Institutes of Sweden
Richa Mitra
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Johanna Huhtasaari
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Konstantina Iordanidou
Chalmers, Physics, Condensed Matter and Materials Theory
Julia Wiktor
Chalmers, Physics, Condensed Matter and Materials Theory
Sergey Kubatkin
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Saroj Prasad Dash
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
Rositsa Yakimova
Linköping University
Lunjie Zeng
Chalmers, Physics, Nano and Biophysics
Eva Olsson
Chalmers, Physics, Nano and Biophysics
Samuel Lara Avila
Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics
National Physical Laboratory (NPL)
2D-Tech
ACS Applied Nano Materials
25740970 (eISSN)
Vol. 6 7 6292-6298QUantum Electronics Science and TECHnology training (QuESTech)
European Commission (EC) (EC/H2020/766025), 2018-01-01 -- 2021-12-31.
Quantum criticality and new quantum matter in two-dimensional Dirac materials
Swedish Research Council (VR) (2021-05252), 2022-01-01 -- 2025-12-31.
Plasmon-exciton coupling at the attosecond-subnanometer scale: Tailoring strong light-matter interactions at room temperature
Knut and Alice Wallenberg Foundation (2019.0140), 2020-07-01 -- 2025-06-30.
2D material-based technology for industrial applications (2D-TECH)
VINNOVA (2019-00068), 2020-05-01 -- 2024-12-31.
GKN Aerospace Sweden (2D-tech), 2021-01-01 -- 2024-12-31.
Subject Categories
Textile, Rubber and Polymeric Materials
Other Materials Engineering
Condensed Matter Physics
DOI
10.1021/acsanm.3c00652