Scalable Fabrication of Edge Contacts to 2D Materials: Implications for Quantum Resistance Metrology and 2D Electronics
Journal article, 2023

We report a reliable and scalable fabrication method for producing electrical contacts to two-dimensional (2D) materials based on the tri-layer resist system. We demonstrate the applicability of this method in devices fabricated on epitaxial graphene on silicon carbide (epigraphene) used as a scalable 2D material platform. For epigraphene, data on nearly 70 contacts result in median values of the one-dimensional (1D) specific contact resistances ρc ∼ 67 Ω·μm and follow the Landauer quantum limit ρc ∼ n-1/2, consistently reaching values ρc < 50 Ω·μm at high carrier densityn. As a proof of concept, we apply the same fabrication method to the transition metal dichalcogenide (TMDC) molybdenum disulfide (MoS2). Our edge contacts enable MoS2 field-effect transistor (FET) behavior with an ON/OFF ratio of >106 at room temperature (>109 at cryogenic temperatures). The fabrication route demonstrated here allows for contact metallization using thermal evaporation and also by sputtering, giving an additional flexibility when designing electrical interfaces, which is key in practical devices and when exploring the electrical properties of emerging materials.

2D material

edge-contacts

graphene

MoS 2

epitaxial graphene

Author

Naveen Shetty

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Hans He

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

RISE Research Institutes of Sweden

Richa Mitra

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Johanna Huhtasaari

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Konstantina Iordanidou

Chalmers, Physics, Condensed Matter and Materials Theory

Julia Wiktor

Chalmers, Physics, Condensed Matter and Materials Theory

Sergey Kubatkin

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Saroj Prasad Dash

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Rositsa Yakimova

Linköping University

Lunjie Zeng

Chalmers, Physics, Nano and Biophysics

Eva Olsson

Chalmers, Physics, Nano and Biophysics

Samuel Lara Avila

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

National Physical Laboratory (NPL)

2D-Tech

ACS Applied Nano Materials

25740970 (eISSN)

Vol. 6 7 6292-6298

QUantum Electronics Science and TECHnology training (QuESTech)

European Commission (EC) (EC/H2020/766025), 2018-01-01 -- 2021-12-31.

Quantum criticality and new quantum matter in two-dimensional Dirac materials

Swedish Research Council (VR) (2021-05252), 2022-01-01 -- 2025-12-31.

Plasmon-exciton coupling at the attosecond-subnanometer scale: Tailoring strong light-matter interactions at room temperature

Knut and Alice Wallenberg Foundation (2019.0140), 2020-07-01 -- 2025-06-30.

2D material-based technology for industrial applications (2D-TECH)

VINNOVA (2019-00068), 2020-05-01 -- 2024-12-31.

GKN Aerospace Sweden (2D-tech), 2021-01-01 -- 2024-12-31.

Subject Categories

Textile, Rubber and Polymeric Materials

Other Materials Engineering

Condensed Matter Physics

DOI

10.1021/acsanm.3c00652

More information

Latest update

3/7/2024 9