Scalable Fabrication of Edge Contacts to 2D Materials: Implications for Quantum Resistance Metrology and 2D Electronics
Artikel i vetenskaplig tidskrift, 2023
We report a reliable and scalable fabrication method for producing electrical contacts to two-dimensional (2D) materials based on the tri-layer resist system. We demonstrate the applicability of this method in devices fabricated on epitaxial graphene on silicon carbide (epigraphene) used as a scalable 2D material platform. For epigraphene, data on nearly 70 contacts result in median values of the one-dimensional (1D) specific contact resistances ρc ∼ 67 Ω·μm and follow the Landauer quantum limit ρc ∼ n-1/2, consistently reaching values ρc < 50 Ω·μm at high carrier densityn. As a proof of concept, we apply the same fabrication method to the transition metal dichalcogenide (TMDC) molybdenum disulfide (MoS2). Our edge contacts enable MoS2 field-effect transistor (FET) behavior with an ON/OFF ratio of >106 at room temperature (>109 at cryogenic temperatures). The fabrication route demonstrated here allows for contact metallization using thermal evaporation and also by sputtering, giving an additional flexibility when designing electrical interfaces, which is key in practical devices and when exploring the electrical properties of emerging materials.
2D material
edge-contacts
graphene
MoS 2
epitaxial graphene
Författare
Naveen Shetty
Chalmers, Mikroteknologi och nanovetenskap, Kvantkomponentfysik
Hans He
Chalmers, Mikroteknologi och nanovetenskap, Kvantkomponentfysik
RISE Research Institutes of Sweden
Richa Mitra
Chalmers, Mikroteknologi och nanovetenskap, Kvantkomponentfysik
Johanna Huhtasaari
Chalmers, Mikroteknologi och nanovetenskap, Kvantkomponentfysik
Konstantina Iordanidou
Chalmers, Fysik, Kondenserad materie- och materialteori
Julia Wiktor
Chalmers, Fysik, Kondenserad materie- och materialteori
Sergey Kubatkin
Chalmers, Mikroteknologi och nanovetenskap, Kvantkomponentfysik
Saroj Prasad Dash
Chalmers, Mikroteknologi och nanovetenskap, Kvantkomponentfysik
Rositsa Yakimova
Linköpings universitet
Lunjie Zeng
Chalmers, Fysik, Nano- och biofysik
Eva Olsson
Chalmers, Fysik, Nano- och biofysik
Samuel Lara Avila
Chalmers, Mikroteknologi och nanovetenskap, Kvantkomponentfysik
National Physical Laboratory (NPL)
2D-Tech
ACS Applied Nano Materials
25740970 (eISSN)
Vol. 6 7 6292-6298QUantum Electronics Science and TECHnology training (QuESTech)
Europeiska kommissionen (EU) (EC/H2020/766025), 2018-01-01 -- 2021-12-31.
Kvantkriticitet och ny kvantmateria i tvådimensionella Dirac-material
Vetenskapsrådet (VR) (2021-05252), 2022-01-01 -- 2025-12-31.
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Knut och Alice Wallenbergs Stiftelse (2019.0140), 2020-07-01 -- 2025-06-30.
2D material-baserad teknologi för industriella applikationer (2D-TECH)
VINNOVA (2019-00068), 2020-05-01 -- 2024-12-31.
GKN Aerospace Sweden (2D-tech), 2021-01-01 -- 2024-12-31.
Ämneskategorier
Textil-, gummi- och polymermaterial
Annan materialteknik
Den kondenserade materiens fysik
DOI
10.1021/acsanm.3c00652