(Cl2:Ar) ICP/RIE dry etching of Al(Ga)Sb for AlSb/InAs HEMTs
Paper in proceeding, 2007
Author
Eric Lefebvre
Chalmers, Microtechnology and Nanoscience (MC2)
Malin Borg
Chalmers, Microtechnology and Nanoscience (MC2)
Mikael Malmkvist
Chalmers, Microtechnology and Nanoscience (MC2)
Jan Grahn
Chalmers, Microtechnology and Nanoscience (MC2)
Ludovic Desplanque
Xavier Wallart
Yannick Roelens
Gilles Dambrine
Alain Cappy
Sylvain Bollaert
Proc. 19th Indium Phosphide and Related Materials
pp. 125-128
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering