Fabrication of nanowire growth templates by forming pinholes in SiOx on Si

Paper i proceeding, 2016

InAs nanowire growth is carried out on a thin grainy layer of SiOx on Si (111), utilizing the openings of pinholes in the SiOx layer by isotropic wet etching. SiOx layers with different thicknesses were deposited and etched down to different thicknesses, to investigate how the initial layer roughness and the etching depth influence the formation of pinholes and thereafter the NW growth.