Large-Scale Metasurfaces Made by an Exposed Resist
Artikel i vetenskaplig tidskrift, 2020

Phase-gradient metasurfaces have the potential to revolutionize photonics by offering ultrathin alternatives to a wide range of common optical elements, including bulky refractive optics, waveplates, and axicons. However, the fabrication of state-of-the-art metasurfaces typically involves several expensive, time-consuming, and potentially hazardous processing steps. To address this limitation, a facile methodology to construct phase-gradient metasurfaces from an exposed standard electron beam resist is developed. The method dramatically cuts the required processing time and cost as well as reduces safety hazards. The advantages of the method are demonstrated by constructing high-performance flat optics based on the Pancharatnam-Berry phase gradient concept for the entire visible wavelength range. Manufactured devices include macroscopic (1 cm diameter) positive lenses, gratings exhibiting anomalous reflection, and cylindrical metalenses on flexible plastic substrates.


phase gradient metasurfaces

flat optics

flexible optics



Daniel Andrén

Chalmers, Fysik, Nano- och biofysik

Jade Martinez Llinas

Chalmers, Fysik, Nano- och biofysik

Philippe Tassin

Chalmers, Fysik, Kondenserad materie- och materialteori

Mikael Käll

Chalmers, Fysik, Nano- och biofysik

Ruggero Verre

Chalmers, Mikroteknologi och nanovetenskap, Nanotekniklaboratoriet

ACS Photonics

2330-4022 (eISSN)

Vol. 7 4 885-892


Acceleratorfysik och instrumentering

Övrig annan teknik

Annan fysik



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