Large-Scale Metasurfaces Made by an Exposed Resist
Journal article, 2020

Phase-gradient metasurfaces have the potential to revolutionize photonics by offering ultrathin alternatives to a wide range of common optical elements, including bulky refractive optics, waveplates, and axicons. However, the fabrication of state-of-the-art metasurfaces typically involves several expensive, time-consuming, and potentially hazardous processing steps. To address this limitation, a facile methodology to construct phase-gradient metasurfaces from an exposed standard electron beam resist is developed. The method dramatically cuts the required processing time and cost as well as reduces safety hazards. The advantages of the method are demonstrated by constructing high-performance flat optics based on the Pancharatnam-Berry phase gradient concept for the entire visible wavelength range. Manufactured devices include macroscopic (1 cm diameter) positive lenses, gratings exhibiting anomalous reflection, and cylindrical metalenses on flexible plastic substrates.

metalenses

nanofabrication

phase gradient metasurfaces

flat optics

flexible optics

Author

Daniel Andrén

Nano and Biophysics

Jade Martinez Llinas

Nano and Biophysics

Philippe Tassin

Condensed Matter and Materials Theory

Mikael Käll

Nano and Biophysics

Ruggero Verre

Chalmers, Microtechnology and Nanoscience (MC2), Nanofabrication Laboratory

ACS Photonics

2330-4022 (eISSN)

Vol. 7 4 885-892

Subject Categories

Accelerator Physics and Instrumentation

Other Engineering and Technologies not elsewhere specified

Other Physics Topics

DOI

10.1021/acsphotonics.9b01809

More information

Latest update

5/29/2020