Thin foil analysis in the SEM

Artikel i vetenskaplig tidskrift, 2008

This paper explores the possibilities for imaging and chemical analysis of thin foil specimens in the SEM. Bright field and dark field imaging provide high resolution imaging with crystallographic information within the grains. In multiphase materials with varying electron transmission the dark field images generally provide a more even contrast in all phases. It is possible to obtain high-quality quantitative EDX data with high spatial resolution.