Large-Scale Fabrication of Shaped High Index Dielectric Nanoparticles on a Substrate and in Solution
Journal article, 2018

High index dielectric nanoparticles and metasurfaces have been proposed for many different applications, including light harvesting, sensing, and metalenses. However, widespread utilization in practice also requires large-scale fabrication methods able to produce homogeneous structures with engineered optical properties in a cost effective manner. Here, a facile fabrication method for silicon nanoparticles is presented that is scalable to 4 inch wafers and can produce a wide range of nanoparticle shapes on demand. Furthermore, it is shown that the fabricated nanoparticles can be detached from their support using a simple substrate removal technique and then transferred to colloidal suspension. The method is universal in the sense that it can be used to generate monodispersed colloidal solutions of nanoparticles of various shapes, sizes and compositions and it therefore opens up a range of new possibilities for applications, for example in nanomedicine and bionanotechnology.

high index dielectrics

silicon nanoparticles


colloidal solutions



Ruggero Verre

Chalmers, Physics, Bionanophotonics

Nils Odebo Länk

Chalmers, Physics, Bionanophotonics

Daniel Andrén

Chalmers, Physics, Bionanophotonics

Hana Sipova

Chalmers, Physics, Bionanophotonics

Mikael Käll

Chalmers, Physics, Bionanophotonics

Advanced Optical Materials

2195-1071 (eISSN)

Vol. 6 7 1701253

Subject Categories

Atom and Molecular Physics and Optics

Other Materials Engineering

Condensed Matter Physics



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4/5/2022 1